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18 Results for 'Lithography'
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Technology
BLOCK COPOLYMER SELF-ALIGNMENT ON ISOLATED CHEMICAL STRIPES
UW-Madison and University of Chicago researchers have developed a method for directed self-assembly of block copolymer films that relies on obtaining the correct balance of surface energies for the te...
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Michael Arnold, Robert Jacobberger, Paul Nealey, Shisheng Xiong, Zhenqiang Ma, Tzu-Hsuan Chang | P190247US02
Technology
Atomic Layer Chemical Patterns For Block Copolymer Assembly
Provided herein are methods of directed self-assembly (DSA) on atomic layer chemical patterns and related compositions. The atomic layer chemical patterns may be formed from two-dimensional materials ...
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Zhenqiang Ma, Paul Nealey, Michael Arnold, Robert Jacobberger, Tzu-Hsuan Chang, Shisheng Xiong | P150238US02
Technology
Directed Assembly Of Block Copolymer Films Between A Chemically Patterned Surface And A Second Surface
Provided are methods of fabricating thin film structures that involve assembling block copolymer materials in the presence of condensed phase surfaces on both sides of the thin film, at least one of w...
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Paul Nealey, Huiman Kang, Guoliang Liu, Hiroshi Yoshida, Yashuhiko Tada, Juan DePablo, Abelardo Ramirez-Hernandez | P110189US02
Technology
New Method for Direct Patterning in Block Copolymer Lithography
Most microelectronic devices are fabricated using top-down processes such as photolithography. Current top-down processes face growing limitations as the demand for smaller scale applications increase...
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Padma Gopalan, Eungnak Han | P100296US02
Technology
Block Copolymers for Sub-10 Nanometer Lithography
Block copolymer (BCP) lithography is one of the most powerful technologies of the digital electronics era, allowing millions of nanoscale components to be fabricated on a single chip.BCPs are made of ...
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Padma Gopalan, Xiang Yu, Myungwoong Kim, Daniel Sweat | P140025US01
Technology
Improved Method for Density Multiplication and Lithography via Directed Block Copolymer Assembly
The creation and replication of nanoscale patterns is becoming increasingly important for the development of new electromechanical, chemical and biological devices at the micro- and nanoscale. For e...
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Paul Nealey, Huiman Kang, Francois Detcheverry, Juan DePablo, Ricardo Ruiz, Thomas R. Albrecht | P09061US
Technology
Directed Self-Assembly of Block Copolymers to Make Bit Patterned Media
In magnetic recording bit patterned media (BPM), each magnetic bit is physically isolated in the form of nanometer-scale islands. These features can be fabricated by nano-imprint lithography in which ...
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Paul Nealey, Guoliang Liu, Ricardo Ruiz, Elizabeth Dobisz | P110093US01
Technology
Degradable Neutral Layer for BCP Lithography
The lithographic process is one of the most powerful technologies of the digital electronics era. Lithography allows hundreds of millions of components to be fabricated on a single chip with pattern f...
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Padma Gopalan, Daniel Sweat, Jonathan Choi, Myungwoong Kim | P130174US01
Technology
Patterned Graphene for Field Effect Transistors
Interest in graphene has surged due to its outstanding electrical properties. Graphene is a two-dimensional, carbon-based material with high tensile strength, stiffness, optical transparency and therm...
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Michael Arnold, Padma Gopalan, Nathaniel Safron, Myungwoong Kim, Jonathan Choi | P110242US01
Technology
Improved Block Copolymer Engineering for Directed Self-Assembly of Thin Films
Block copolymers (BCPs) are a class of polymers synthesized from two or more bonded units. Forming BCPs in bulk, and turning the material into thin film, can produce nanoscale structures useful to man...
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Paul Nealey, Frank Bates, Sangwon Kim | P110274US02
Technology
Bottom-Up Patterning of Smooth Graphene Microstructures and Nanostructures
One of the strongest, lightest and most conductive materials known, graphene is an atom-thick carbon film with unrivaled high-tech potential. It is stronger than diamond but capable of bending like ru...
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Michael Arnold, Padma Gopalan, Nathaniel Safron, Myungwoong Kim | P110245US02
Technology
Improved Method for Forming Nanoscale Structures Using Solvent Annealing of Block Copolymers
Devices in fields including electronics, photonics and biological engineering utilize 2-D and 3-D nanostructures. Traditional patterning methods such as photolithography and electron beam lithography ...
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Paul Nealey, Lei Wan | P110192US02
Technology
Low-Temperature Method for Smoothing the Disordered Edges of Graphene
Graphene possesses tremendous electrical properties, making it suitable for numerous applications. The current method of fabricating this material involves growing or isolating a full sheet of graphen...
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Michael Arnold, Padma Gopalan, Nathaniel Safron, Myungwoong Kim | P110246US01
Technology
Synthesis of Low-Cost, High-Density DNA Microarrays
A DNA microarray is a collection of microscopic DNA spots arranged on a solid surface via covalent attachment to a chemically suitable substrate. DNA microarrays allow hundreds of thousands of DNA seq...
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Franco Cerrina, Omar Negrete | P08067US
Technology
Organoelement Resists for EUV Lithography
Extreme ultraviolet (EUV) lithography is one of the most promising techniques for creating semiconductor devices, integrated circuits and microelectronic devices with nanoscale features (i.e., smaller...
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Paul Nealey, Franco Cerrina, Lin Zhu, Junyan Dai, Christopher Ober | P04335US
Technology
Materials and Methods for Creating Nanoscale Patterned Features with Atomically Smooth Surfaces
Production of faster, more powerful microelectronics requires that device features continue to shrink in size. Current lithographic processes based on chemically amplified resists routinely pattern fe...
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Paul Nealey, Erik Edwards, Juan DePablo, Tushar Jain | P05233US
Technology
Directed Assembly of Triblock Copolymers
The current art of nanoscale manufacturing uses self-assembling diblock copolymers to replicate a chemical pattern upwards. This method may be used to replicate a chemical pattern over a large area. H...
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Paul Nealey, Juan DePablo, Frank Bates | P06113US
Technology
Silicon Nanomembrane Thermoelectric Materials and Devices
Thermoelectric materials can turn heat into electrical power or remove heat by applying a voltage. They are used in many applications, ranging from a simple, electrically cooled ice chest, to high-tec...
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Max Lagally, Paul Evans, Clark Ritz | P06453US